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New Materials for 157nm Lithographic Optics

SCT (Silicon Crystal Technologies) announced the receipt of a patent (No. 6334899, name Continuous Crystal Plate Growth Apparatus) for processing technology,
purification of calcium fluoride and crystal growth. SCT has been developing this technology since 1995.

The technology is designed to purify calcium fluoride used in the manufacture of optical lenses for 193 nm and 157 nm lithographic instruments.

Traditionally used for the visible spectrum, silica glass lenses are not suitable for ultraviolet radiation, as they have too high optical absorption coefficient for wavelengths less than 157 nm. Therefore, developers of lithography equipment for semiconductor chip manufacturers have to look for new materials to overcome this problem. But with calcium fluoride, too, everything is not so simple – it is necessary that the lenses are made of monocrystalline, very pure CaF2. The low quality of currently obtained calcium fluoride crystals, unfortunately, reduces the efficiency of this material.

Kirill A. Pandelisev (Dr. Kiril A. Pandelisev, Lead Scientist and Chief Executive Officer of SCT, reported that at best, only 3-5% of all calcium fluoride crystals are obtained, satisfying the requirements of 157nm optics. Therefore, a new method of purification of calcium fluoride was proposed, which allows you to effectively and controllably remove unnecessary impurities. For example, it is possible to remove Erbium (Er) and Lutetium (Lu), which eliminates the fluorescence at 157 nm, which, in turn, leads to the formation of a more contrasting image. Lead (Pb) stripping further reduces absorption by 157 nm. In addition, the SCT method allows you to control the content of impurities and, thus, to influence the optical properties of the crystal, including the nature of birefringence.

SCT also claims that the developed method of crystal growth can be used for materials other than calcium fluoride. In particular, for the growth of crystals CaxBa1-xF2, CaxSr1-xF2 (1 < x < 0) или других кристаллов, которые невозможно вырастить по методу Бриджмана-Стокбаргера (Bridgman-Stockbarger) из-за проблем сегрегации и переохлаждения при кристаллизации.

Source: Semiconductor Fabtech

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